The low TOC rinse waters (second and final rinses and organic-free rinses) account for approximately 40 % of the total UPW consumption in an average semiconductor fabrication ffacility. Depending on their conductivity systems with or without Ion-Exchange stages will be used.
Rinse water containing organics is generated from several cleaning processes and organic baths. This high TOC rinse water can be recovered for recycle or reuse by CHRIST’s organic removal systems. These specialized plants consist of advanced monitoring and control devices, followed by activated carbon filters and various organic removal steps. The entire process is specifically designed to the type and concentration of the various organic compounds.
