The fabrication of semiconductor devices requires large volumes of ultrapure water, and generates large volumes of wastewater. A reliable wastewater treatment and reclaim system is necessary to protect the environment and to conserve the resources needed for the growth of the industry.
| Reclaim: |
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Water that would normally go to waste being captured, reused or recycled. |
| Recycle: |
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Effluent discharged from a system/process is captured, treated (refurbished) and brought back to the same system/process. |
| Reuse: |
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Effluent from system/process “A” is recovered, possibly treated, and then used in system/process “B”. |
